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Growth of solid solutions of aluminum nitride and silicon carbide by metalorganic chemical vapor deposition

✍ Scribed by Jenkins, I.; Irvine, K.G.; Spencer, M.G.; Dmitriev, V.; Chen, N.


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
260 KB
Volume
128
Category
Article
ISSN
0022-0248

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