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Growth of SiNx and SiCx thin films by pulsed reactive crossed-beam laser ablation

✍ Scribed by Z. Shi; J.-M. Yang; T. Fan; D. Zhang; R. Wu

Publisher: Springer
Year: 2000
Tongue: English
Weight: 166 KB
Volume: 70
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s003390050054

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