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Growth of SiC from the liquid phase: wetting and dissolution of SiC

✍ Scribed by Syväjärvi, M.; Yakimova, R.; Janzén, E.


Book ID
122394363
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
695 KB
Volume
6
Category
Article
ISSN
0925-9635

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The aim of this work is to elucidate the mechanism involved in the 3C-SiC formation during growth by a vapor-liquid-solid mechanism on 6H-SiC substrate. Polytype selection is shown to occur at the first stage of the experiments, before propane injection into the reactor. The contact of the seed with