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Growth of semipolar (10) InN on m -plane sapphire using MOVPE

✍ Scribed by Duc V. Dinh; M. Pristovsek; R. Kremzow; M. Kneissl


Book ID
112182986
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
308 KB
Volume
4
Category
Article
ISSN
1862-6254

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## Abstract We have investigated the heteroepitaxy of indium nitride (InN) directly grown on nitridated sapphire substrates having different orientations. Growths were performed on __C__, __A__, __M__ and __R__‐plane oriented sapphire in order to analyse the substrate orientation effect on the stru

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## Abstract MOVPE growth of InN on sapphire substrate is reviewed focusing on the critical growth parameters. Based on our in situ spectroscopic ellipsometry results obtained during growth and the results found in the literature we suggest a strategy for successful growth of high quality InN layers