Growth of semipolar (10) InN on m -plane sapphire using MOVPE
β Scribed by Duc V. Dinh; M. Pristovsek; R. Kremzow; M. Kneissl
- Book ID
- 112182986
- Publisher
- John Wiley and Sons
- Year
- 2010
- Tongue
- English
- Weight
- 308 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1862-6254
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## Abstract We have investigated the heteroepitaxy of indium nitride (InN) directly grown on nitridated sapphire substrates having different orientations. Growths were performed on __C__, __A__, __M__ and __R__βplane oriented sapphire in order to analyse the substrate orientation effect on the stru
## Abstract MOVPE growth of InN on sapphire substrate is reviewed focusing on the critical growth parameters. Based on our in situ spectroscopic ellipsometry results obtained during growth and the results found in the literature we suggest a strategy for successful growth of high quality InN layers