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Growth of polycrystalline InN on silica glass by ECR-MBE

✍ Scribed by T. Araki; T. Ueno; H. Naoi; Y. Nanishi

Book ID
104557589
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
212 KB
Volume
2
Category
Article
ISSN
1862-6351

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## Abstract __a__‐plane InN nanostructures were fabricated on a hole‐patterned __a__‐plane GaN template by electron‐cyclotron‐resonance plasma‐excited molecular beam epitaxy (ECR‐MBE). The growth temperature should be optimized to realize precise nucleation at the patterned holes with sufficient In