𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Growth of Ni2Si by rapid thermal annealing: Kinetics and moving species

✍ Scribed by E. Ma; B. S. Lim; M. -A. Nicolet; M. Natan


Publisher
Springer
Year
1987
Tongue
English
Weight
391 KB
Volume
44
Category
Article
ISSN
1432-0630

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Growth of oxide-mediated ternary silicid
✍ M. Xu; A. Vantomme; K. Vanormelingen; S.D. Yao πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 496 KB

We reported a simple method to grow good-quality CoSi 2 film by using Si cap technology and introducing moderate Ni. First, a cobalt layer of $15 nm with a Si cap layer with a different thickness deposited onto the Si surface with a thin silicon oxide buffer is applied to investigate the formation o