Growth of highly c-axis oriented (B, Al)N film on diamond for high frequency surface acoustic wave devices

✍ Scribed by Jen-Hao Song; Jow-Lay Huang; Tatsuya Omori; James C. Sung; Sean Wu; Horng-Hwa Lu; Ding-Fwu Lii

• Book ID: 113937242
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 561 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.08.090