Growth of high-quality epitaxial ZnO films on (10–10) sapphire by atomic layer deposition with flow-rate interruption method

✍ Scribed by Huang, Jheng-Ming; Ku, Ching-Shun; Lee, Hsin-Yi; Lin, Chih-Ming; Chen, San-Yuan

• Book ID: 123449287
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 802 KB
• Volume: 231
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2012.05.067