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Growth of cubic boron nitride and boron-carbon-nitrogen coatings using N-trimethylborazine in an electron cyclotron resonance plasma process

✍ Scribed by Weber, A.; Bringmann, U.; Nikulski, R.; Klages, C.-P.

Book ID: 121999784
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 460 KB
Volume: 2
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(93)90053-5

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