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Growth of carbon nanotubes on stainless steel substrates by DC-PECVD

✍ Scribed by Dao Quang Duy; Hyun Suk Kim; Dang Mo Yoon; Kang Jae Lee; Jung Woong Ha; Yong Gyoo Hwang; Choong Hun Lee; Bach Thanh Cong

Book ID
108064019
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
526 KB
Volume
256
Category
Article
ISSN
0169-4332

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This article reports on carbon nanotubes (CNT) grown on TiN/Cu stacks by plasma enhanced chemical vapor deposition (PECVD) at 450 Β°C. Ni catalyst was deposited by two techniques -physical vapor deposition (PVD) and electrochemical deposition (ECD). First, the influence of the catalyst thickness and