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Growth of boron nitride thin films by tuned substrate RF magnetron sputtering

✍ Scribed by Gimeno, S.; Andu´jar, J.L.; Bertran, E.; Lousa, A.


Book ID
122680288
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
391 KB
Volume
5
Category
Article
ISSN
0925-9635

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