Growth of Al and Al nitride films in N2−Ne and N2−(Ne+Ar) discharges: construction of a ternary gas phase diagram: James R Siettmann and Carolyn Rubin Aita,J Vac Sci Technol,A6, 1988, 1712–1716

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 150 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90820-8