Growth rate of yttria-stabilized zirconi
✍
Minoru Inaba; Atsushi Mineshige; Tomoyuki Maeda; Shinji Nakanishi; Tadayoshi Tak
📂
Article
📅
1997
🏛
Elsevier Science
🌐
English
⚖ 579 KB
Thin films of yttria-stabilized zirconia (YSZ) were formed onto nickel oxide substrates by an electrochemical vapor deposition process using the substrates as oxygen sources, and ZrCl, and YCl, as metal sources. After deposition at 1000°C for l-6 h, dense films of cubic YSZ were formed. The film thi