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Growth kinetics of thermal oxidation process on Si(100) by real time ultraviolet photoelectron spectroscopy

✍ Scribed by Y. Enta; Y. Takegawa; M. Suemitsu; N. Miyamoto

Book ID: 118400156
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 386 KB
Volume: 100-101
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(96)00318-2

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