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Growth kinetics of Si on fullsheet, patterned and silicon-on-insulator substrates

✍ Scribed by J.M. Hartmann; A. Abbadie; M. Vinet; L. Clavelier; P. Holliger; D. Lafond; M.N. Séméria; P. Gentile


Book ID
108341979
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
431 KB
Volume
257
Category
Article
ISSN
0022-0248

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