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Growth and Structural Characterization of Spherical Silicon Crystals Grown from Polysilicon

โœ Scribed by Majid Gharghi; Siva Sivoththaman


Book ID
107455273
Publisher
Springer US
Year
2008
Tongue
English
Weight
649 KB
Volume
37
Category
Article
ISSN
0361-5235

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## Abstract Silicon crystals grown with the Czochralski method are still the most common material used for the production of electronic devices. In recent years, a growing need of large diameter crystals with increasingly higher doping levels is observed, especially to support the expanding market