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Growth and properties of YBaCu-oxide superconducting thin films prepared by magnetron sputtering

✍ Scribed by X.X. Xi; H.C. Li; J. Geerk; G. Linker; O. Meyer; B. Obst; F. Ratzel; R. Smithey; F. Weschenfelder


Book ID
108465687
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
150 KB
Volume
153-155
Category
Article
ISSN
0921-4534

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Preparation of MgB2 superconducting thin
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Superconductor MgB 2 thin films with thickness 200 nm were prepared on sapphire substrates by co-deposition of boron and magnesium. Precursor MgB thin films were deposited from two independent magnetron sources-boron by rf magnetron sputtering and magnesium by dc magnetron sputtering. MgB precursor