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Growth and properties of MOCVD YBa2Cu3O7−x thin films

✍ Scribed by Thomas, O.; Hudner, J.; Östling, M.; Mossang, E.; Chenevier, B.; Weiss, F.; Boursier, D.; Senateur, J.P.


Book ID
122548621
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
334 KB
Volume
195
Category
Article
ISSN
0925-8388

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MOCVD of YBa2Cu3O7−x thin films using a
✍ K. Fröhlich; J. Šouc; S. Chromik; D. Machajdik; V. Kliment 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 414 KB

We have prepared superconducting YBa2CU3OT\_x films by MOCVD using fluorocarbon based Ba (hfa)2 precursor. The films were deposited at 500°C and annealed in low pressure (pO2= 10 -2 Pa) dry oxygen atmosphere as well as in argon/oxygen mixture in the presence of water vapour. The samples on a MgO sin