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Growth and properties of epitaxial rare-earth scandate thin films

✍ Scribed by T. Heeg; J. Schubert; C. Buchal; E. Cicerrella; J.L. Freeouf; W. Tian; Y. Jia; D.G. Schlom

Book ID
106020046
Publisher
Springer
Year
2006
Tongue
English
Weight
707 KB
Volume
83
Category
Article
ISSN
1432-0630

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πŸ“œ SIMILAR VOLUMES

Rare-earth scandate single- and multi-la
Rare-earth scandate single- and multi-layer thin films as alternative gate oxides for microelectronic applications
✍ T. Heeg; M. Wagner; J. Schubert; Ch. Buchal; M. Boese; M. Luysberg; E. Cicerrell πŸ“‚ Article πŸ“… 2005 πŸ› Elsevier Science 🌐 English βš– 642 KB

Thin films of rare-earth scandates (REScO 3 ) as well as multi-layers of scandates and titanates have been prepared using pulsed laser deposition. Epitaxial films were grown on SrRuO 3 /SrTiO 3 (100) as well as amorphous films on silicon substrates. The epitaxial films are investigated to measure th