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Growth and nanoscale ferroelectric investigation of radiofrequency-sputtered LiNbO3 thin films

✍ Scribed by V Bornand; B Gautier; Ph Papet


Book ID
113780820
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
287 KB
Volume
86
Category
Article
ISSN
0254-0584

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## Abstract Undoped and Neodymium‐doped gallium oxide (Ga~2~O~3~) thin films of about 500 nm thickness were successfully grown at different temperatures ranging from 100 up to 600 Β°C by radiofrequency magnetron sputtering. Post‐annealing treatments were carried out at 900 Β°C and 1000 Β°C. The obtain