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Growth and characterization of strain compensated Si1−x−y epitaxial layers

✍ Scribed by J.L. Regolini; F. Gisbert; G. Dolino; P. Boucaud

Book ID: 119124981
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 369 KB
Volume: 18
Category: Article
ISSN: 0167-577X
DOI: 10.1016/0167-577x(93)90056-4

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