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Growth and characterization of polar and nonpolar ZnO film grown on sapphire substrates by using atomic layer deposition

✍ Scribed by Kim, Ki-Wook; Son, Hyo-Soo; Choi, Nak-Jung; Kim, Jihoon; Lee, Sung-Nam

Book ID: 122726457
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 692 KB
Volume: 546
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2013.03.071

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## Abstract We have investigated the heteroepitaxy of indium nitride (InN) directly grown on nitridated sapphire substrates having different orientations. Growths were performed on __C__, __A__, __M__ and __R__‐plane oriented sapphire in order to analyse the substrate orientation effect on the stru