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Growth and characterization of phosphorus doped diamond films

✍ Scribed by Flemish, J.R.; Schauer, S.N.; Wittstruck, R.; Landstrass, M.I.; Plano, M.A.

Book ID
122841259
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
643 KB
Volume
3
Category
Article
ISSN
0925-9635

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## Abstract Phosphorus‐doped diamond films were grown by plasma‐enhanced chemical vapor deposition using organophosphorus gases, tertiarybutylphosphine (TBP) and trimethylphosphine (TMP). The electronic properties are characterized based on secondary ion mass spectroscopy, Hall‐effect, and cathodol