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Growth and characterization of Cr2N/CrN multilayer coatings

✍ Scribed by S.M. Aouadi; D.M. Schultze; S.L. Rohde; K.-C. Wong; K.A.R. Mitchell

Book ID
108422882
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
205 KB
Volume
140
Category
Article
ISSN
0257-8972

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CrNx, MoNx, CrOx, MoOx and CrN/Mo 2 N multilayer films were deposited by reactive sputtering. Characterization of the coatings was carried out using XRD, XPS, optical profilometer, and nano-indentation. The oxidation of the thin films was studied as a function of annealing temperature. Tribological