Synthesis and characterization of CrN/Mo2N multilayers and phases of Molybdenum nitride

✍ Scribed by Robin Abraham Koshy; Michael E. Graham; Laurence D. Marks

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 649 KB
• Volume: 202
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2007.07.090

✦ Synopsis

CrNx, MoNx, CrOx, MoOx and CrN/Mo 2 N multilayer films were deposited by reactive sputtering. Characterization of the coatings was carried out using XRD, XPS, optical profilometer, and nano-indentation. The oxidation of the thin films was studied as a function of annealing temperature. Tribological characterization of the Cr 2 O 3 and the Mo-oxides was carried out as a function of annealing temperature. The low friction behavior of MoOx and MoNx was demonstrated. The deposition of CrNx and MoNx was also characterized and multilayer deposition of CrN and Mo 2 N was carried out. The hardness of Mo 2 N and CrN and the multilayers were shown to lie in the 20-30 GPa hardness regime. The multilayers are stable up to 500 °C in air and up to 1000 °C in argon. Initial friction testing on the multilayer coatings showed an activated self-lubricating mechanism.