## Abstract Micro‐ and nanoelectromechanical systems are being designed and intensively investigated for their use in various sensor applications. In this issue's Editor's Choice [1] micromechanical resonator beams with high fundamental frequencies were realized. The cover picture shows a scanning
Group-III-Nitride Based Gas Sensing Devices
✍ Scribed by Schalwig, J. ;M�ller, G. ;Ambacher, O. ;Stutzmann, M.
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 140 KB
- Volume
- 185
- Category
- Article
- ISSN
- 0031-8965
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