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Grounded radio-frequency electrodes in contact with high density plasmas

โœ Scribed by Aanesland, A.; Charles, C.; Boswell, R. W.; Lieberman, M. A.

Book ID
120086676
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
457 KB
Volume
12
Category
Article
ISSN
1070-664X

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Grounded radio-frequency electrodes in c
Grounded radio-frequency electrodes in contact with high density plasmas
โœ Aanesland, A.; Charles, C.; Boswell, R. W.; Lieberman, M. A. ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› American Institute of Physics ๐ŸŒ English โš– 457 KB

An analytical model is developed of an asymmetric electrode system immersed in a plasma, consisting of two dc-grounded electrodes, where the smaller one is biased at 13.56MHz. The model is compared with a set of experiments performed in a high density low pressure plasma source (an electron cyclotro