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Greenwood–Williamson Model Combining Pattern-Density and Pattern-Size Effects in CMP

✍ Scribed by Vasilev, B.; Rzehak, R.; Bott, S.; Kücher, P.; Bartha, J.W.


Book ID
114669486
Publisher
IEEE
Year
2011
Tongue
English
Weight
764 KB
Volume
24
Category
Article
ISSN
0894-6507

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