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A feature scale Greenwood–Williamson model predicting pattern-size effects in CMP

✍ Scribed by Boris Vasilev; Sascha Bott; Roland Rzehak; Peter Kücher; Johann W. Bartha

No coin nor oath required. For personal study only.

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Greenwood–Williamson Model Combining Pat

✍ Vasilev, B.; Rzehak, R.; Bott, S.; Kücher, P.; Bartha, J.W. 📂 Article 📅 2011 🏛 IEEE 🌐 English ⚖ 764 KB