Imaging polymers with supercritical carb
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Prof. Christopher K. Ober; Dr. Allen H. Gabor; Dr. Paula Gallagher-Wetmore; Dr.
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Article
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1997
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John Wiley and Sons
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English
β 407 KB
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In lithographic techniques for forming nanostructures in surface and polymer thin films, the selectivity of the solvent becomes increasingly important as the target dimensions decrease. Polymerβbased developers. The Figure shows the SC CO~2~βdeveloped image of a copolymer of pentafluoroproyl methacr