𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Imaging polymers with supercritical carbon dioxide

✍ Scribed by Prof. Christopher K. Ober; Dr. Allen H. Gabor; Dr. Paula Gallagher-Wetmore; Dr. Robert D. Allen


Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
407 KB
Volume
9
Category
Article
ISSN
0935-9648

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✦ Synopsis


In lithographic techniques for forming nanostructures in surface and polymer thin films, the selectivity of the solvent becomes increasingly important as the target dimensions decrease. Polymer‐based developers. The Figure shows the SC CO~2~–developed image of a copolymer of pentafluoroproyl methacrylate and tert‐butyl methacrylate.magnified image


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