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Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition

โœ Scribed by Keski-Kuha, Ritva A. M. ;Osantowski, John F. ;Toft, Albert R. ;Partlow, William D.


Book ID
115339332
Publisher
The Optical Society
Year
1988
Tongue
English
Weight
454 KB
Volume
27
Category
Article
ISSN
1559-128X

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