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Grain boundary mediated leakage current in polycrystalline HfO2 films

✍ Scribed by K. McKenna; A. Shluger; V. Iglesias; M. Porti; M. Nafría; M. Lanza; G. Bersuker

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 575 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2011.03.024

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