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Glow discharge optical spectroscopy depth profiles of ion implanted steel, titanium and titanium nitride coatings

✍ Scribed by F Seidel; H.-R Stock; P Mayr


Book ID
114086267
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
217 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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A comparative study of two techniques to depth proÐle multilayer Ni-Fe alloy coatings has been performed. Both conventional cross-sectioning with energy-dispersive x-ray imaging (EDX) and glow discharge optical emission spectroscopy (GDOES) sputter depth proÐling methods have been compared in terms