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Glancing incidence diffuse X-ray scattering studies of implantation damage in Si

✍ Scribed by K. Nordlund; P. Partyka; Y. Zhong; I.K. Robinson; R.S. Averback; P. Ehrhart


Book ID
114170524
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
239 KB
Volume
147
Category
Article
ISSN
0168-583X

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