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Germanium implantation into amorphous silicon films

โœ Scribed by Alexey V. Ershov; Alexander A. Ezhevskii; Alexander F. Khokhlov; Dmitri A. Khokhlov; Alexander I. Mashin; Nikolay I. Mashin


Book ID
113288043
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
431 KB
Volume
106
Category
Article
ISSN
0168-583X

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