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Germanium-carbon multilayer films prepared by magnetron sputtering — structure and thermally induced formation of Ge-nanocrystals

✍ Scribed by Thomas-Maik John; Peter Veit; Rainer Anton; Tilo P. Drüsedau


Book ID
108389023
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
298 KB
Volume
296
Category
Article
ISSN
0040-6090

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TiO 2 thin films were deposited on stainless steel substrates by radio frequency (RF) magnetron sputtering. The process conditions, including RF power, oxygen partial pressure, and temperature of substrate, were varied systematically. The deposited titanium dioxide films consisted of polycrystalline