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Geometrized dynamics of multidimensional cosmological models

✍ Scribed by Marek Szydłowski


Publisher
Springer
Year
1994
Tongue
English
Weight
782 KB
Volume
33
Category
Article
ISSN
0020-7748

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Multidimensional geometric modeling for
✍ P. Regli; K. Lamboglia; G. Garretón; M. Neeracher; M. Westermann; N. Strecker; W 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 672 KB

This article gives an overview of our current state of the art in generating 3D geometry and doping representations for complex semiconductor devices. Focusing on the multidimensional aspects, we describe how -starting from the mask layout and the standard process representation (SPR)-the 3D device