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Multidimensional geometric modeling for 3D TCAD

✍ Scribed by P. Regli; K. Lamboglia; G. Garretón; M. Neeracher; M. Westermann; N. Strecker; W. Fichtner


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
672 KB
Volume
34
Category
Article
ISSN
0167-9317

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✦ Synopsis


This article gives an overview of our current state of the art in generating 3D geometry and doping representations for complex semiconductor devices. Focusing on the multidimensional aspects, we describe how -starting from the mask layout and the standard process representation (SPR)-the 3D device geometry and doping distribution is built by assembling simulations of different dimensionality.


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