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Generation of focused electron beam and X-rays by the doped LiNbO3 crystals

✍ Scribed by M. Bayssie; J.D. Brownridge; N. Kukhtarev; T. Kukhtarev; J.C. Wang

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
147 KB
Volume
241
Category
Article
ISSN
0168-583X

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Fabrication of high-aspect-ratio submicr
Fabrication of high-aspect-ratio submicron-to-nanometer range microstructures in LiNbO3 for the next generation of integrated optoelectronic devices by focused ion beams (FIB)
✍ Shizhuo Yin πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 150 KB πŸ‘ 2 views

The fabrication of high-aspect-ratio submicron-to-nanometer range microstructures in LiNbO using a state-of-the-art Schlum-3 ( ) berger AMS 3000 focused ion-beam FIB system is presented. The submicron structures with about 350 nm width and 1600 nm depth are fabricated by employing XeF gas-assisted g