Automated on-wafer extraction of equival
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Humberto Campanella; Pascal Nouet; Arantxa Uranga; Pedro de Paco; Nuria Barniol;
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Article
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2007
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John Wiley and Sons
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English
⚖ 180 KB
👁 1 views
## Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from exp