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Ge deposition from digermane on the Si(100)-(2 × 1) surface

✍ Scribed by Hee-Chuen Cho


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
239 KB
Volume
92
Category
Article
ISSN
0169-4332

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Identification of GeH3 on Si(100)-(2×1)
✍ Debra-Ann Klug; Wei Du; C.Michael Greenlief 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 495 KB

The low-temperature adsorption and decomposition of digermane on Si( 100) has been investigated by ultraviolet photoelectron spectroscopy. Exposure of Ge2H, to Si ( 100) at 110 K results in molecular adsorption and ab initio calculations of gas phase Ge2H6 are used to help interpret the low temperat