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GCT orders plasma etch tool

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Multi-chamber plasma etch cluster tool

📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 263 KB

Integrated plasma processing simulation

✍ M. Hauguth; B.E. Volland; V. Ishchuk; D. Dressler; T. Danz; I.W. Rangelow; G. Ko 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 291 KB