Gate-First Integration of Tunable Work Function Metal Gates of Different Thicknesses Into High-/Metal Gates CMOS FinFETs for Multi- Engineering

✍ Scribed by Hussain, M.M.; Smith, C.E.; Harris, H.R.; Young, C.D.; Hsing-Huang Tseng; Jammy, R.

• Book ID: 114619906
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 866 KB
• Volume: 57
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2009.2039097