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Gas source silicon molecular beam epitaxy using silane

✍ Scribed by Hirayama, Hiroyuki; Tatsumi, Toru; Ogura, Atsushi; Aizaki, Naoaki

Book ID: 121272220
Publisher: American Institute of Physics
Year: 1987
Tongue: English
Weight: 685 KB
Volume: 51
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.99009

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