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Gas sensitivity of phthalocyanine thin films

✍ Scribed by M. Passard; C. Maleysson; A. Pauly; S. Dogo; J.-P. Germain; J.-P. Blanc


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
281 KB
Volume
19
Category
Article
ISSN
0925-4005

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Interfaces of either microcrystalline Si (lc-Si) on the organic sensitizer phthalocyaninatozinc (PcZn) or of PcZn on amorphous Si (a-Si) were prepared to study the compatibility of the film growth of Si by chemical vapor deposition with the thermal and chemical stability of PcZn. The compatibility c