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Gas-Pulsed CVD for Film Growth in the CuNiN System

✍ Scribed by Erik Lindahl; Mikael Ottosson; Jan-Otto Carlsson


Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
322 KB
Volume
18
Category
Article
ISSN
0948-1907

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In-Situ Optical Pyrometry in the CVD of
✍ C. Gasqueres; F. Maury; F. Ossola πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 273 KB πŸ‘ 1 views

## Abstract In‐situ temperature measurement is essential in CVD in order to control the temperature of the growing films. This is frequently achieved by optical pyrometry because it is a sensitive, convenient, and inexpensive technique that can be used in corrosive atmospheres. In this work, in‐sit