✦ LIBER ✦

Gas heating and throw distance for the sputter deposition of aluminum and tungsten

✍ Scribed by DruÌsedau, Tilo P.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface treatment of aluminum oxide and

✍ W Ensinger; H.R Müller 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 113 KB

Modeling of heat transfer and fluid flow

✍ A. Farzadi; S. Serajzadeh; A. H. Kokabi 📂 Article 📅 2007 🏛 Springer 🌐 English ⚖ 279 KB

A simulation study of long throw sputter

✍ Smy, T.; Tan, L.; Chan, K.; Tait, R.N.; Broughton, J.N.; Dew, S.K.; Brett, M.J. 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 332 KB

Distribution of the heat and current flu

✍ N. S. Tsai; T. W. Eagar 📂 Article 📅 1985 🏛 The Minerals, Metals & Materials Society 🌐 English ⚖ 532 KB

The effects of substrate bias on phase s

✍ James E. Krzanowski; Jose L. Endrino 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 327 KB

Deposition and Characterization of Tungs

✍ Tolga Tavsanoglu, Ceren Begum, Murat Alkan, Onuralp Yucel 📂 Article 📅 2013 🏛 The Minerals, Metals & Materials Society 🌐 English ⚖ 349 KB