✦ LIBER ✦
A simulation study of long throw sputtering for diffusion barrier deposition into high aspect vias and contacts
✍ Scribed by Smy, T.; Tan, L.; Chan, K.; Tait, R.N.; Broughton, J.N.; Dew, S.K.; Brett, M.J.
- Book ID
- 114537345
- Publisher
- IEEE
- Year
- 1998
- Tongue
- English
- Weight
- 332 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0018-9383
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