✦ LIBER ✦

Gas-discharge excimer radiation source for the yellow region

✍ Scribed by Guivan, N. N.; Malinin, A. N.

Book ID: 115401938
Publisher: Optical Society of America
Year: 2006
Tongue: English
Weight: 109 KB
Volume: 73
Category: Article
ISSN: 1070-9762
DOI: 10.1364/JOT.73.000519

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A gas discharged based radiation source

A gas discharged based radiation source for EUV-lithography

✍ R. Lebert; K. Bergmann; G. Schriever; W. Neff 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 549 KB

A new high repetitive, compact and low cost gas discharge based EUV ,,lamp" has been studied as an alternative to laser-produced plasmas as EUV sources. First results using oxygen in a fast discharge of electrically stored energy around 1 J lead to a conversion efficiency of about 0.1% for the emiss

Features of the pulsed inductive dischar

Features of the pulsed inductive discharge formation for pumping gas-discharge radiation sources

✍ A. I. Fedorov 📂 Article 📅 2009 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 149 KB

Optical-electronic stabilization of the

Optical-electronic stabilization of the radiation of gas-discharge light sources

✍ A. B. Gorovits; D. P. Milenina; N. S. Sventitskii 📂 Article 📅 1973 🏛 Springer US 🌐 English ⚖ 397 KB

The response of river discharge to clima

The response of river discharge to climate fluctuations in the source region of the Yellow River

✍ Jianfeng Zhang, Guomin Li, S. Liang 📂 Article 📅 2011 🏛 Springer-Verlag 🌐 English ⚖ 826 KB

A new radiation source for the infrared

A new radiation source for the infrared region

✍ Yarwood, J.; Shuttleworth, T.; Hasted, J. B.; Nanba, T. 📂 Article 📅 1984 🏛 Nature Publishing Group 🌐 English ⚖ 400 KB

Highly repetitive, extreme-ultraviolet r

Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma

✍ Bergmann, Klaus ;Schriever, Guido ;Rosier, Oliver ;Müller, Martin ;Neff, Willi ; 📂 Article 📅 1999 🏛 The Optical Society 🌐 English ⚖ 112 KB